Scanning electron microscope based parametric testing method and

Details Scanning electron microscope based parametric testing method and Scanning electron microscope based parametric testing method and

1989-03-22

1990-12-18

Karlsen, Ernest F.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324 731, 250311, G01R 3128

Patent

active

049789082

ABSTRACT:
A scanning electron microscope (28) is connected to a test structure (48) formed on a semiconductor wafer. The test structure (48) comprises a plurality of first parallel structures (54) and a plurality of second parallel structure (56) transverse to and interlocking with the first structures (54). An island (60) is formed within a grid (58) formed by the structures (54-56) and is separated therefrom. An electron beam (38) from the scanning electron microscope (28) is aimed at the structure (48) and secondary electrons emitted therefrom are visually displayed on a monitor (44). The visual display (47) provides information on whether the island (60) is electrically separated from the mesh (58) or shorted thereto by comparing the intensity of the various islands (60).

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patent: 3983479 (1976-09-01), Lee et al.
patent: 4621232 (1986-11-01), Chang et al.
patent: 4841242 (1989-06-01), Brunner
patent: 4843329 (1989-06-01), Beha et al.
Abstract-"Voltage Contrast Electron Beam Testing Experiments on VLSI Chip Packaging Substrates", Ollie C. Woodard, Fred Hartnett, Tom Myers, Andrew Ross and Ronald Thompson; Microelectronics and Computer Technology Corporation, Austin, Texas; Nov./Dec., 1988.
"Photovoltage Scanning Electron Microscopy", L. D. Flesner and M. E. O'Brien; General Physics Advance Abstracts, vol. 5, No. 5, Mar. 10, 1989.
Colbourne et al; "Reliability . . . "; Proc. of the IEEE; vol. 62; No. 2; Feb. 1974; pp. 244-259.

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