Scanning electron microscope and CD measurement calibration...

Details Scanning electron microscope and CD measurement calibration... Scanning electron microscope and CD measurement calibration...

2008-04-22

2008-04-22

Kim, Robert (Department: 2881)

Radiant energy

Infrared-to-visible imaging

Including liquid crystal detector

C250S252100, C250S491100, C250S492200

Reexamination Certificate

active

11165223

ABSTRACT:
A calibration standard specimen is provided to have formed therein calibrating patterns of a lattice shape discontinuously arrayed, and particular alignment patterns respectively disposed near the calibrating patterns so that the positioning of the specimen can be made to match the calibrating patterns to the measurement points.

REFERENCES:
patent: 7078691 (2006-07-01), Nakayama
patent: 2005/0184234 (2005-08-01), Nakayama
patent: 2006/0289756 (2006-12-01), Nakayama
patent: 7-71947 (1995-03-01), None
patent: 08-31363 (1996-02-01), None
patent: 2003-279321 (2003-10-01), None

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