Scanning electron beam device

Details Scanning electron beam device Scanning electron beam device

1993-05-07

1995-06-06

Dzierzynski, Paul M.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

250310, G01N 2300

Patent

active

054224861

ABSTRACT:
The invention relates to a scanning electron beam device in which at least one electrostatic reflector is provided for reflection of a secondary electron beam emitted by the primary electron beam on the object. This reflector is preferably located outside the beam path of the primary electron beam, and at least one electron-optical element which effects a preliminary deflection of the secondary electron beam by a small angle with respect to the beam path of the primary electron beam is provided between the object and the reflector. Such an arrangement makes it possible with comparatively low technical expenditure to reflect the secondary electron beam by a relatively large angle with respect to the unaffected primary electron beam which travels on a straight axis.

REFERENCES:
patent: 4658136 (1987-04-01), Ohtaka et al.
patent: 4683376 (1987-07-01), Feuerbaum
patent: 4823005 (1989-04-01), Garth
Septieme Congres International de Microscopie Electronique, Grenoble (1970), pp. 205-206.
J. Vac. Sci. Technol. B9(6), Nov./Dec. 1991 pp. 3010-3014.

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