Scanning device and fabrication method thereof

Details Scanning device and fabrication method thereof Scanning device and fabrication method thereof

2005-08-16

2008-11-18

Cherry, Euncha P (Department: 2872)

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

Reexamination Certificate

active

07453617

ABSTRACT:
A scanning device includes a mirror unit formed on a substrate so as to be pivotable centering around one axis for adjusting the direction of reflected light; a support frame formed at one surface of the mirror unit for preventing dynamic deflection of the mirror unit and supporting the mirror unit; and a driving unit provided on the substrate and driving the mirror unit. Thus, a dynamic deflection phenomenon does not occur when the mirror unit is pivoted centering around the pivoting axis. Accordingly, stable operation is possible and the angle of rotation of the mirror unit can be accurately adjusted, so that the scanning device can be effectively used in a high-speed precision scanning system.

REFERENCES:
patent: 6295154 (2001-09-01), Laor et al.
patent: 2005/0243396 (2005-11-01), Fujii et al.
patent: 4224599 (1994-03-01), None
patent: 1 215 518 (2002-06-01), None
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patent: 1020040015497 (2004-02-01), None

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