Optics: measuring and testing – Inspection of flaws or impurities – Having predetermined light transmission regions
Patent
1981-03-30
1983-03-29
Corbin, John K.
Optics: measuring and testing
Inspection of flaws or impurities
Having predetermined light transmission regions
356236, G01N 2100
Patent
active
043781594
ABSTRACT:
A scanning laser contaminant and defect detector for reflective surfaces, having a light collector for increasing sensitivity to scattered light. The collector is preferably one quadrant of a spherical shell cradled between V-shaped reflective side walls. The collector has beam entrance and exit ports, as well as a detector port where a light detector resides. The collector is placed in proximity to a surface to be inspected. Light scattered from the test surface is directed to the reflective crown surface, then to the reflective side walls and ultimately to the detector.
REFERENCES:
patent: 3790287 (1974-02-01), Cuthbert
patent: 3931525 (1976-01-01), Clarke
patent: 4321630 (1982-03-01), Kramer
"A Laser Scan Technique for Electronic Materials Surface Evaluation," Oswald and Munro (Bell Laboratories) in Journal of Electronic Materials, vol. 3, No. 1, p. 225 (1974).
"Optical Scanning of Silicon Wafers for Surface Contaminants," Martin and Williams in Electro-optical Systems Design, p. 45, Sep. 1980.
Drawing from Coptec, Inc. SemiScan 3 advertisement.
Block diagram from Ford Aerospace & Communications Corporation, "Automatic Laser Fabric Inspection and Control Systems" brochure.
Corbin John K.
Koren Matthew W.
Schneck Thomas
Tencor Instruments
LandOfFree
Scanning contaminant and defect detector does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Scanning contaminant and defect detector, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Scanning contaminant and defect detector will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1202356