Scanning capacitance microscope

Dynamic information storage or retrieval – Condition indicating – monitoring – or testing – Including radiation storage or retrieval

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369126, 250307, 250311, 324 64, 358342, G11B 906

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active

RE0324574

ABSTRACT:
Variations in topography and material properties of the surface layer of a body are observed in microscopic imaging using a scanning capacitance probe. The acronym SCaM identifying the process and apparatus is derived from the phrase scanning capacitance microscope. The material properties observable by SCaM are the surface-electric property representative of the complex dielectric constant of the surface material and the surface-mechanical property representative of the elastic constant of the surface material.

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Dr. Gerd Binnig, "Scanning Tunneling Microscope", Abstract of Condensed Matter Seminar, Sep. 1981, Rutgers Univ.
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