Scanning capacitance microscope

Details Scanning capacitance microscope Scanning capacitance microscope

1981-09-30

1984-11-06

Cardillo, Jr., Raymond F.

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358342, 369126, G11B 906

Patent

active

044816162

ABSTRACT:
Variations in topography and material properties of the surface layer of a body are observed in microscopic imaging using a scanning capacitance probe. The acronym SCaM identifying the process and apparatus is derived from the phrase scanning capacitance microscope. The material properties observable by SCaM are the surface-electric property representative of the complex dielectric constant of the surface material and the surface-mechanical property representative of the elastic constant of the surface material.

REFERENCES:
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patent: 4267732 (1981-05-01), Quate
patent: 4307419 (1981-12-01), Matey et al.
patent: 4325134 (1982-04-01), Langley
J. K. Clemens, "Capacitive Pickup and the Buried Subcarrier Encoding System for the RCA VideoDisc," RCA Review, vol. 39, No. 1, Mar. 1978, pp. 33-59.
R. N. Rhodes, "The VideoDisc Player," RCA Review, vol. 39, No. 1, Mar. 1978, pp. 198-221.
Abstract of a Seminar at Rutgers University of New Jersey on Sep. 8, 1981 on "Scanning Tunneling Microscope" by Dr. Gerd Binnig.

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