Measuring and testing – Surface and cutting edge testing – Roughness
Patent
1994-12-15
1995-11-28
Raevis, Robert
Measuring and testing
Surface and cutting edge testing
Roughness
310317, H01J 3700
Patent
active
054697344
ABSTRACT:
The scanning apparatus linearization and calibration system includes an electromechanical scanner having a sample stage portion, and a deflecting member, mounted between the scanning means and a fixed mounting member, that undergoes deflection in response to displacement of the scanner sample stage portion in at least one dimension of displacement. Strain gauges are mounted to the deflecting member for measuring the deflection of the deflecting member and for generating a deflection output signal indicative of an amount of deflection of the deflecting member, to provide a highly sensitive indication of actual displacement of the sample stage of the scanning apparatus. Control circuitry also provides for open loop displacement correction and for closed loop feedback correction of the position of the scanner sample stage.
REFERENCES:
patent: 4359892 (1982-11-01), Schnell et al.
patent: 4952857 (1990-08-01), West et al.
patent: 5051646 (1991-09-01), Elings et al.
patent: 5153434 (1992-10-01), Yajima et al.
patent: 5223713 (1993-06-01), Uozumi et al.
"A Microprocessor-Based Technique for Transducer Linearization" by J. V. Moskaitis and D. S. Blomquist; Precision Engineering, 1983; pp. 5-8.
"Piezoelectric Scanning of Fabry-Perot Spectrometers: Nonlinearities" by G. Hernandez; Applied Optics/vol. 17, No. 19/1 Oct. 1978; pp. 3088-3095.
"Linear Scanning Circuit for A Piezoelectrically Controlled Fabry-Perot Etalon" by S. M. Lindsay and I. W. Shepherd; Rev. Sci. Instrum., vol. 48, No. 9, Sep. 1977; pp. 1228-1229.
"Improving the Linearity of Piezoelectric Ceramic Actuators" Electronics Letters 27th May 1982 vol. 18 No. 11; pp. 442-444.
"Linearisation of the Scanning Motion of a Piezoelectrically Driven Fabry-Perot Interferometer" by M. Sedlacek; J. Phys. E:Sci. Instrum., vol. 17, 1984; pp. 854-855.
"Piezolectric Ceramic Displacement Characteristics at Low Frequencies and Their Consequences in Fabry-Perot Interferometry" by R. W. Basedow and T. D. Cocks 1980 the Institute of Physics; pp. 840-844.
"The Behavior and Calibration of Some Piezoelectric Ceramics Used in the STM" by S. Vieira; IBM J. Res. Develop. vol. 30 No. 5 Sep. 1986; pp. 553-556.
"Near-Field Optical Scanning Microscopy with Tunnel-Distance Regulation" By Urs Durig, Dieter Pohl and Flavio Rohner; IBM J. Res. Develop vol. 30 No. 5 Sep. 1986; pp. 478-483.
"Math Model of Hysteresis in Piezo-Electric Actuators for Precision Pointing Systems" by P. R. Dahl and R. Wilder; The Aerospace Corporation, El Segundo, Calif.; Annual Rocky Mountain Guidance and Control Conference Feb. 2-6 1985.
"Force Microscopy" by Nancy A. Burnham and Richard J. Colton, Naval Research Laboratory, Washinton D.C.; pp. 1-75.
Raevis Robert
Topometrix
LandOfFree
Scanning apparatus linearization and calibration system does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Scanning apparatus linearization and calibration system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Scanning apparatus linearization and calibration system will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2005497