Scanning apparatus linearization and calibration system

Details Scanning apparatus linearization and calibration system Scanning apparatus linearization and calibration system

1995-11-20

1997-06-24

Raevis, Robert

Measuring and testing

Surface and cutting edge testing

Roughness

H01J 3700

Patent

active

056418973

ABSTRACT:
The scanning apparatus linearization and calibration system includes an electromechanical scanner having a sample stage portion, and a deflecting member, mounted between the scanning means and a fixed mounting member, that undergoes deflection in response to displacement of the scanner sample stage portion in at least one dimension of displacement. Strain gauges are mounted to the deflecting member for measuring the deflection of the deflecting member and for generating a deflection output signal indicative of an amount of deflection of the deflecting member, to provide a highly sensitive indication of actual displacement of the sample stage of the scanning apparatus. Control circuitry also provides for open loop displacement correction and for closed loop feedback correction of the position of the scanner sample stage.

REFERENCES:
patent: 4359892 (1982-11-01), Schnell et al.
Durig et al., "Near-Field optical scanning microscopy with tunnel-distance regulation", IBM J Res vol. 30 No. 5 Sep. 1986, pp. 478-483.

Affiliated with

Also associated with

Rating

Scanning apparatus linearization and calibration system does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Scanning apparatus linearization and calibration system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Scanning apparatus linearization and calibration system will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-150214