Scanning apparatus, for producing masks for micro circuits

Details Scanning apparatus, for producing masks for micro circuits Scanning apparatus, for producing masks for micro circuits

1976-02-09

1977-11-29

Hartary, Joseph W.

Electric heating

Microwave heating

Tunnel furnace

219121L, 346 76L, 346108, 350 6, G03B 2700

Patent

active

040608166

ABSTRACT:
A scanning device for providing rapid accurate mechanical line scanning of a preferably flat surface includes a radiation source, a radiation sensitive medium and apparatus for providing relative movement between the radiation source and the medium. The apparatus includes a driving device and a slide structure which is designed to oscillate at substantially its self resonant frequency in order to increase accuracy of operation.

REFERENCES:
patent: 3449754 (1969-06-01), Stutz
patent: 3573849 (1971-04-01), Herriot et al.
patent: 3632205 (1972-01-01), Marcy
patent: 3903536 (1975-09-01), Westerberg
patent: 3925785 (1975-12-01), Firtion et al.

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