Scanning apparatus for a scanning microscope

Details Scanning apparatus for a scanning microscope Scanning apparatus for a scanning microscope

1990-08-09

1991-02-05

Williams, Hezron E.

Measuring and testing

Vibration

By mechanical waves

73606, G01N 2904

Patent

active

049894544

ABSTRACT:
A scanning apparatus for scanning which is used in a scanning microscope having an observation apparatus for observing a sample wherein the sample is secured in order to obtain an image of the same. The scanning apparatus includes a moving apparatus for moving at least either the sample or the observation apparatus in order to scan the sample, and a vibration attenuating element structurally provided for the moving apparatus for attenuating relative vibration between the sample and the observation.

REFERENCES:
patent: 4446738 (1984-05-01), Ishikawa et al.
patent: 4698502 (1987-10-01), Bednorz et al.
"Acoustic Microscopy at Less Than 0.2.degree. K", Rugar et al, Acoustical Imaging, vol. 12, pp. 17-18, Jul. 19, 1982.

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