Radiant energy – Electron energy analysis
Patent
1992-09-29
1994-05-24
Dzierzynski, Paul M.
Radiant energy
Electron energy analysis
250306, 378 84, 378 85, H01J 4948
Patent
active
053151135
ABSTRACT:
An instrument for surface analysis includes a gun for selectively focusing an electron beam on an anode spot, or rastering the beam across an array of such spots, to generate x-rays. A concave monochromator focuses an energy peak of the x-rays to a specimen surface, in a spot on a selected pixel area or across an array of pixel areas on the surface to emit photoelectrons. An analyzer with a detector provides information on the photoelectrons and thereby chemical species in the surface. A second detector of low energy photoelectrons is cooperative with the rastering to produce a scanning photoelectron image of the surface, for viewing of a specimen to be positioned, or for imaging an insulator surface. The monochromator is formed of platelets produced by cutting an array of platelets from a single crystal member, and bonding the platelets to a concave face of a base plate juxtaposed in crystalline alignment in a positioned array identical to that of the initial array.
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Larson Paul E.
Palmberg Paul W.
Dzierzynski Paul M.
Grimes E. T.
Ingham H. S.
Nguyen Kiet T.
The Perkin-Elmer Corporation
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