Scanning analysis and imaging system with modulated electro-magn

Details Scanning analysis and imaging system with modulated electro-magn Scanning analysis and imaging system with modulated electro-magn

1990-06-29

1991-10-22

Howell, Janice A.

X-ray or gamma ray systems or devices

Specific application

Absorption

378 51, 378 43, 250306, 250308, G01N 2306

Patent

active

050602489

ABSTRACT:
A scanning spectral-analysis micro-probe subsystem, for a surface imaging system, utilizes a micro-probe to detect the precise position of a point on a sample object surface having surface dimensions changing responsive to surface absorption of incident radiation from a modulated radiation source. The modulated incident radiation causes the sample region dimensions, in the vicinity of the micro-probe, to be modulated, so that the micro-probe detects this dimensional modulation, with a detected modulation strength directly proportional to the incident radiation absorption.

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patent: 4837435 (1989-06-01), Sakuhara et al.
patent: 4870352 (1989-09-01), Koechner
patent: 4874945 (1989-10-01), Ohi
patent: 4877957 (1989-10-01), Okada et al.
patent: 4914293 (1990-04-01), Hayashi et al.
patent: 4921346 (1990-05-01), Tokumoto et al.
patent: 4941753 (1990-07-01), Wickramasinghe
patent: 4952857 (1990-08-01), West et al.

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