Scanning acoustic microscope

Measuring and testing – Vibration – By mechanical waves

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73642, G01N 2900

Patent

active

046465731

ABSTRACT:
The disclosed scanning acoustic microscope comprises a solid lens body consisting of two sections of materials having different sound propagation characteristics but matching acoustic impedances. A lens is formed by the interface of said two sections and has a focal point coinciding with the apex of a sharply pointed tip formed at the free surface of one of said sections. The tip and the specimen to be investigated are immersed in a coupling medium having a relatively high acoustic absorption coefficient. The lens body carries an acoustic transducer on its surface remote from the tip for sending plane sound waves through the lens and tip onto the specimen. Acoustic waves reflected from the specimen are also received by this transducer. Acoustic waves transmitted through the specimen optionally may be received by a transducer arranged on the opposite side of the specimen. By appropriate processing of the received signals, high-resolution (10 nm) images of the specimen can be obtained.

REFERENCES:
patent: 3934460 (1976-01-01), Sherwin et al.
patent: 4151752 (1979-05-01), Perdijon
patent: 4487069 (1984-12-01), Ishikawa et al.
patent: 4491020 (1985-01-01), Chubachi
patent: 4541281 (1985-09-01), Chubachi et al.
patent: 4587848 (1986-05-01), Nakamura et al.

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