Electricity: motive power systems – Positional servo systems – 'reset' systems
Reexamination Certificate
2004-08-27
2008-10-07
Leykin, Rita (Department: 2837)
Electricity: motive power systems
Positional servo systems
'reset' systems
C318S609000, C318S560000, C318S621000, C700S014000, C700S041000, C700S045000, C700S058000, C700S059000, C700S042000, C700S043000
Reexamination Certificate
active
07432681
ABSTRACT:
A scanner system includes a servo control unit. A rotation angle of a rotating shaft supporting a mirror is detected, and an error of the detected value with respect to a commanded value is integrated by an integral compensator so that the detected value is able to track the commanded value. A tracking error proportional compensator is disposed in parallel with the integral compensator so as to add a correction value proportional to the error to the integrated value of the error. A plurality of gains are prepared for each of the integral compensator, the tracking error proportional compensator, a detected value proportional compensator and a detected value differential compensator of the servo control unit. Each gain is changed in accordance with a travel angle of the commanded value. Thus, the mirror can be positioned quickly so that the machining speed can be improved.
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Okubo Yaichi
Otsuki Haruaki
Sakamoto Atsushi
Seki Kenta
Toyama Souichi
Crowell & Moring LLP
Hitachi Via Mechanics Ltd.
Leykin Rita
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