Scanner optimization for reduced across-chip performance...

Details Scanner optimization for reduced across-chip performance... Scanner optimization for reduced across-chip performance...

2005-12-07

2008-12-02

Bahta, Kidest (Department: 2123)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S098000, C438S040000

Reexamination Certificate

active

07460922

ABSTRACT:
The disclosed embodiments reduce across-chip performance variation through non-contact electrical metrology. According to a feature is a process control system that includes a component that measures transistor electrical performance in a product wafer. Also included in the system is a mapping component that converts the transistor performance into exposure dose values and a process tool that communicates the exposure dose value to a scanner. The exposure dose value is fed back for optimization of future chip exposures. The disclosed embodiments directly optimize transistor performance, thus controlling an important parameter in many integrated circuits.

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