Scanner element having a constant resonance frequency, and...

Details Scanner element having a constant resonance frequency, and... Scanner element having a constant resonance frequency, and...

2008-01-01

2008-01-01

Phan, James (Department: 2872)

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

C347S233000, C248S608000

Reexamination Certificate

active

07315410

ABSTRACT:
A scanner element includes a frame part formed by a substrate, a movable plate formed inside the frame part and a torsion bar swingably supporting the movable plate on the frame part. One of the movable plate and the torsion bar has an adjusting part formed by a process of forming the movable plate and the torsion bar so that a ratio of an actual value of a moment of inertia I+ΔI of the movable plate to an actual value of a spring constant K+ΔK of the torsion bar is substantially equal to a ratio of a design value of the moment of inertia I of the movable plate to a design value of the spring constant K of the torsion bar.

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