Scanner and method for operating a scanner

Details Scanner and method for operating a scanner Scanner and method for operating a scanner

2005-02-01

2005-02-01

Phan, James (Department: 2872)

Optical: systems and elements

Miscellaneous

C359S196100, C700S060000, C318S628000

Reexamination Certificate

active

06850376

ABSTRACT:
The invention relates to a scanner, wherein a position of a moveable part of the scanner is adjusted by inputting a command variable which changes repeatedly in the same manner. A command signal corresponding to the command variable is supplied to a controller (3), the controller (3) being constructed for correcting a setpoint deviation in the presence of a command variable which is constant in time. A control error of the controller (3) which arises from the change in the command variable is corrected by evaluating a setpoint deviation of the position of the moveable part or an equivalent variable, obtaining from this a correction signal and changing an output signal of the controller (3) by using the correction signal.

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Tietze, Schenk, “Halbleiter-Schaltungstechnik”, pp. 1133-1155 and 1272-1283, 11th edition, Springer-Verlag, Berlin/Heidelberg (Germany) and New York (USA), 1999, ISBN 3-540-64192-0.
Iwase, et al. 2002/0125222, Sep. 12, 2002.

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