Scan type projection exposure apparatus and microdevice manufact

Details Scan type projection exposure apparatus and microdevice manufact Scan type projection exposure apparatus and microdevice manufact

1995-04-18

1998-01-06

Grimley, Arthur T.

Photocopying

Projection printing and copying cameras

Illumination systems or details

355 67, 359227, H01L 2130, G03B 2772

Patent

active

057060770

ABSTRACT:
A scanning projection exposure apparatus includes an imaging system for imaging a pattern of an original, placed on an object plane, upon a substrate, and a scanning device for relatively scanning the original and the substrate relative to the imaging system, wherein the imaging system provides different imaging positions with respect to a direction of an optical axis, to plural zones on the object plane, which zones are juxtaposedly defined along a direction of scan.

REFERENCES:
patent: 4688932 (1987-08-01), Suzuki
patent: 5184176 (1993-02-01), Unno et al.
patent: 5194893 (1993-03-01), Nishi
patent: 5459000 (1995-10-01), Unno
Patent Abstracts of Japan, Kokai No. JP 2-220425, vol. 14, No. 524, Nov. 16, 1990.

Affiliated with

Also associated with

Rating

Scan type projection exposure apparatus and microdevice manufact does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Scan type projection exposure apparatus and microdevice manufact, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Scan type projection exposure apparatus and microdevice manufact will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2333653