Photocopying – Projection printing and copying cameras – Step and repeat
Patent
1997-08-28
1999-06-29
Lee, Eddie C.
Photocopying
Projection printing and copying cameras
Step and repeat
355 67, G03B 2742, G03B 2754
Patent
active
059175800
ABSTRACT:
A scan type exposure method and apparatus in which a projection optical system projects, at a projection station, a portion of a pattern of an original onto a region on a substrate, an original stage moves the original relative to the projection optical system in an original scanning direction, a first substrate stage moves the substrate relative to the projection optical system in a substrate scanning direction, a second substrate stage moves the substrate relative to the projection optical system in an optical axis direction of the projection optical system, a synchronism controller controls, in the projection of the original onto the substrate through the projection optical system, synchronism between the movement of the original stage in the original scanning direction and the movement of the first substrate stage in the substrate scanning direction, a measuring device measures a position of the surface of the substrate with respect to the optical axis direction at a measurement point spaced from the projection station of and a stage controller controls, in the control of the synchronism between the movement of the original stage and the movement of the first substrate stage through the synchronism controller, movement of the substrate stage through the second substrate stage on the basis of a measured value of the measuring device and of a correction value for correcting an error produced with movement of the first substrate stage from the measurement point to the projection station over a portion of the substrate to be measured.
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Asano Tosiya
Ebinuma Ryuichi
Canon Kabushiki Kaisha
Lee Eddie C.
Nguyen Hung Henry
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