Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Patent
1994-12-02
1996-09-17
Dougherty, Thomas M.
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
250306, G01N 2300
Patent
active
055571565
ABSTRACT:
A method of controlling a scanner, particularly a scanner for use in scanning probe microscopes such as an atomic force microscope, including the steps of generating a scan voltage which varies as a parametric function of time, applying the scan voltage to the scanner, sensing plural positions of the scanner upon application of the scan voltage, fitting a parametric function to the sensed scanner positions, and controlling at least one parameter of the scan voltage function based on the parametric function fitted to the sensed scanner positions in the fitting step. In a preferred embodiment, the scan voltage is a polynomial parametric function of time and the order of terms of the polynomial is set in relation to the size of the scan being controlled, with small scans having at least one order term and relatively larger scans having plural order terms. Thus, the sensed position data are used, not to control the motion of the scanner directly in a closed loop system, but instead to optimize the transducer calibration parameters for subsequent open looped scan control of a portion of a total scan, with the calibration of the transducer scan voltage parameters periodically occurring.
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Johnson et al., "Scophony Spatial Light Modulator", Optical Engineering, vol. 24, No. 1, Jan?Feb. 1985, pp. 93-100.
Digital Instruments, Inc.
Dougherty Thomas M.
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