Geometrical instruments – Distance measuring – Error compensation
Patent
1989-06-22
1991-08-13
Haroian, Harry N.
Geometrical instruments
Distance measuring
Error compensation
33707, G01B 304
Patent
active
050384910
ABSTRACT:
A scale, for measuring the displacement of an object to be examined, has a division and a mark for alignment of the division, and a displacement measuring apparatus, for measuring the displacement of a scale, has a device for reading the division of the scale and a detector for detecting the positional error of the division relative to the direction of the displacement.
REFERENCES:
patent: 4587622 (1986-05-01), Herzog
patent: 4628609 (1986-12-01), Rieder et al.
patent: 4777728 (1988-10-01), Ludicke
Ishii Satoshi
Ishizuka Koh
Nishimura Tetsuharu
Tsukiji Masaaki
Canon Kabushiki Kaisha
Haroian Harry N.
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