Scalable stocker with automatic handling buffer

Details Scalable stocker with automatic handling buffer Scalable stocker with automatic handling buffer

2008-02-05

2011-12-06

Keenan, James (Department: 3652)

Material or article handling

Plural, static structures for supporting discrete loads and...

Load-underlying members

C414S411000, C414S217000, C414S940000

Reexamination Certificate

active

08070410

ABSTRACT:
Scalable storage can be achieved with linear array storage of wafers, comprising two linear arrays of storage compartments on opposite walls, with a middle transfer mechanism. Together with a buffer station for automatic material handling system, a scalable bare wafer stocker can provide flexible and uninterrupted services to a fabrication facility.

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patent: 2003 182815 (2003-07-01), None
patent: WO 00/62332 (2000-10-01), None
PCT search report and written opinion—PCT/IB2009/050457—dated May 20, 2009.

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