Stone working – Sawing – Reciprocating
Patent
1998-08-18
2000-03-14
Rachuba, M.
Stone working
Sawing
Reciprocating
836511, 83 14, 125 21, B28D 108
Patent
active
060358459
ABSTRACT:
A saw strip for fixing a crystal of semiconductor material when cutting wafers from this crystal using a wire saw, and a method for cutting wafers using the saw strip. The strip has a section adjoining the crystal that has a hardness which essentially corresponds to the hardness of the crystal. The saw strip may be a composite of several sections and/or may have a hollow cross section.
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Patent Abstracts of Japan, vol. 097, No. 005, May 30, 1997, & JP 9-019921, an. 21, 1997.
Rachuba M.
Vaughn T. Anthony
Wacker Siltronic Gesellschaft fur Halbleitermaterialien AG
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