Saw devices with reflection-suppressing fingers

Details Saw devices with reflection-suppressing fingers Saw devices with reflection-suppressing fingers

1985-04-01

1987-02-10

Jordan, Charles T.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310313C, 333151, 333195, H01L 4108

Patent

active

046425071

ABSTRACT:
Each IDT (inter-digital transducer) of a SAW (surface acoustic wave) device has a linearly tapered back edge formed by reflection-suppressing fingers of successively decreasing length spaced apart with a pitch of lambda/4 behind the active region of the IDT, where lambda is the wavelength of a SAW to be propagated, whereby SAW reflections at the back edge of the IDT are substantially eliminated. A thin resistive doped silicon film between the back edge of each IDT and the adjacent edge of the substrate absorbs waves propagated via this back edge. The film underlies the IDTs to provide improved adhesion to the substrate.

REFERENCES:
patent: 4030050 (1977-06-01), Deacon et al.
patent: 4139791 (1979-02-01), Yamada et al.
patent: 4201964 (1980-05-01), Noro et al.
patent: 4206380 (1980-06-01), Hazama et al.
patent: 4223286 (1980-04-01), Ono et al.
patent: 4350963 (1982-09-01), Iwamoto et al.
patent: 4420728 (1983-12-01), Bower

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