Saw device and method of manufacture

Details Saw device and method of manufacture Saw device and method of manufacture

1988-06-29

1994-09-06

Nelson, Peter A.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

H01L 4108

Patent

active

053451341

ABSTRACT:
A SAW device such as a resonator includes a surface supporting surface wave propagation and a pair of aluminum transducer elements each coupled to said surface wave propagation surface. Each aluminum transducer element is doped with a predetermined amount of silicon. Frequency shifts which result from exposing the SAW device to high temperature cycles as often encountered when packaging the device are reduced, since the silicon present as a dopant in the aluminum will provide an effect on frequency which can be taken into consideration during design and fabrication. These frequency effects will dominate any frequency effects which may result from silicon migration from the substrate to the transducers as a result of the thermal cycling encountered during sealing of the SAW device.

REFERENCES:
patent: 4012650 (1977-03-01), Pratt et al.
patent: 4155057 (1979-05-01), Sandy et al.
patent: 4243960 (1981-01-01), White et al.
patent: 4401956 (1983-08-01), Joshi
patent: 4477892 (1984-10-01), Tosima et al.
patent: 4870313 (1989-09-01), Hirama et al.

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