SAW device and method for forming same

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices

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310313R, H01L 4108, H03H 925

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active

057605246

ABSTRACT:
A surface acoustic wave (SAW) device (300) is formed from a leaky wave mode piezoelectric substrate (310) to have substantially reduced surface wave attenuation when operating at a particular frequency. The SAW device (300) includes a SAW pattern (322, 324), disposed on a surface (321) of the piezoelectric substrate, having a free surface portion (324) and a shorted surface portion (322). The SAW pattern (322, 324) is overlaid with a material (330), preferably glass, which has a thickness selected to reduce surface wave attenuation.

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