Saw device and its manufacturing method

Details Saw device and its manufacturing method Saw device and its manufacturing method

1996-08-29

1998-12-01

Dougherty, Thomas M.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310363, 310364, H03H 925

Patent

active

058443479

ABSTRACT:
A SAW device comprising an inter-digital electrode capable of withstanding application of excessive electric power, while preventing an increase of insertion loss. The SAW device has an inter-digital electrode formed by alternating layers of aluminum films and conductive films, where the conductive films have an elastic constant greater than that of the aluminum films.

REFERENCES:
patent: 4445066 (1984-04-01), Nishiyama et al.
patent: 4477952 (1984-10-01), Cresenzi et al.
patent: 5325012 (1994-06-01), Sato et al.
Yuhara, et al., Sputtered Al-Ti Electrodes for High Frequency and High Power SAW Devices, Jap. Journal of Appl. Phys., pp. 135-137, Dec. 9, 1986.

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