Saucer-shaped half-loop MEMS inductor with very low resistance

Details Saucer-shaped half-loop MEMS inductor with very low resistance Saucer-shaped half-loop MEMS inductor with very low resistance

2007-07-31

2007-07-31

Mai, Anh (Department: 2832)

Inductor devices

Coil forms protective casing

C336S200000, C336S174000

Reexamination Certificate

active

11213155

ABSTRACT:
A micro-electromechanical system (MEMS) inductor is formed in a saucer shape that completely surrounds a magnetic core structure which is formed from a ferromagnetic material. In addition, an array of MEMS inductors can be formed by dividing up the saucer-shaped MEMS inductor into a number of electrically-isolated MEMS inductor wedges.

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