Sampling method for fast potential determination in electron bea

Details Sampling method for fast potential determination in electron bea Sampling method for fast potential determination in electron bea

1985-01-22

1986-11-18

Eisenzopf, Reinhard J.

Electricity: measuring and testing

Plural, automatically sequential tests

324158R, G01R 3128

Patent

active

046238360

ABSTRACT:
A sampling method for potential determination in electron beam mensuration, in which a progression of a periodic signal is to be identified at a measuring point, makes it possible to clearly increase the speed in electron beam potential measurement. The progression of the periodic signal is sampled by the pulsed electron beam repeatedly during a period of the progression of the periodic signal, namely at the specified times t.sub.1, t.sub.2. . . t.sub.n.

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