Chemical apparatus and process disinfecting – deodorizing – preser – Analyzer – structured indicator – or manipulative laboratory... – Means for analyzing liquid or solid sample
Reexamination Certificate
2007-01-02
2007-01-02
Warden, Jill (Department: 1743)
Chemical apparatus and process disinfecting, deodorizing, preser
Analyzer, structured indicator, or manipulative laboratory...
Means for analyzing liquid or solid sample
C422S081000, C422S082010, C422S082050, C422S091000, C422S105000, C422S105000
Reexamination Certificate
active
10658948
ABSTRACT:
A method and system for analysis of additives in electrolysis plating solutions, using a flow management system that minimizes loss of plating solutions and decreases sampling time. The system includes at least one analysis chamber, a sampling duct connected to processing tool, a four-way valve positioned between the processing tool and the sampling duct, at least one carrier fluid duct connected to the analysis chamber, at least one actuatable multi-port valve that provides a transference platform between the sampling duct and the at least one carrier fluid duct, and a flow sensor connected to the sampling duct and positioned downstream from the at least one actuatable multi-port valve.
REFERENCES:
patent: 4326940 (1982-04-01), Eckles et al.
patent: 5106413 (1992-04-01), Takehawa
patent: 6495011 (2002-12-01), Robertson
patent: 6592737 (2003-07-01), Robertson
Bhella Richard
Chatterton Thomas
King Mackenzie E.
Advanced Technology & Materials Inc.
Chappuis Margaret
Hultquist Steven J.
Intellectual Property / Technology Law
Siefke Sam P.
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