Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Quality evaluation
Reexamination Certificate
2011-03-01
2011-03-01
Cosimano, Edward R (Department: 2857)
Data processing: measuring, calibrating, or testing
Measurement system in a specific environment
Quality evaluation
C438S014000, C700S109000, C702S182000, C702S187000, C705S007380
Reexamination Certificate
active
07899635
ABSTRACT:
A sampling inspection method is provided. The sampling inspection method is adapted for a multi-product production line including a plurality of tools. The sampling inspection method includes the steps of: providing a tool record, which records a sampling data of each of the tools; then checking each sampling data recorded in the tool record, and finding out at least one unsampled tool from the tools; then defining a plurality of product lots as being performed with process operations by at least one of the at least one unsampled tool; and determining at least one of the product lots for performing a sampling inspection.
REFERENCES:
patent: 2883255 (1959-04-01), Anderson
patent: 5896294 (1999-04-01), Chow et al.
patent: 6577972 (2003-06-01), Yanaru et al.
Chong Boon-Wah
Huang Kai-Ping
Tsai Sung-Lin
Wee Michael Kian Ann
Cosimano Edward R
J.C. Patents
United Microelectronics Corp.
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