Sample support with a non-reflecting sample supporting surface

Details Sample support with a non-reflecting sample supporting surface Sample support with a non-reflecting sample supporting surface

1998-12-08

2000-08-22

Font, Frank G.

Optics: measuring and testing

Photometers

356382, G01J 100

Patent

active

061080772

ABSTRACT:
An optical measurement instrument that detects and analyzes reflected light includes a sample support, such as a wafer supporting chuck, with a sample bearing surface that is configured so as to not reflect light back to the optical measurement instrument. In one embodiment, the sample bearing surface of the sample support is a layer of material that absorbs light in the wavelength or wavelengths being used by the optical measurement instrument. For example, a hard plastic, such as poly-ether-ether-ketone (PEEK), may be used to absorb light in the infrared wavelengths. In another embodiment, the entire sample support may be manufactured from the light absorbing material. In yet another embodiment, the top surface of the sample support is configured with light scattering depressions, which prevent light that is incident on the sample bearing surface from being reflected back to the optical measurement instrument.

REFERENCES:
patent: 3857637 (1974-12-01), Obenreder
patent: 4984894 (1991-01-01), Kondo
patent: 5681888 (1997-10-01), Nomura et al.

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