Sample processing apparatus and sample processing system

Details Sample processing apparatus and sample processing system Sample processing apparatus and sample processing system

2005-09-06

2005-09-06

Hassanzadeh, Parviz (Department: 1763)

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With measuring, sensing, detection or process control means

C156S345250, C118S712000, C216S060000, C438S005000

Reexamination Certificate

active

06939433

ABSTRACT:
It is an object of the invention to provide a vacuum processing device and a vacuum processing system capable of improving the accuracy for the function of estimating the result of processing of samples based on the monitored values for the processing state of the samples, improving the forecasting accuracy and thus improving the yield of products. The system comprises a function of monitoring processing parameters for samples, a function of estimating the processing characteristics of the samples based on the monitored parameters, a function of conducting communication with a measuring device for measuring the processing state of the samples after processing and a function of updating the measuring conditions by the measuring device in accordance with the processing characteristics of the samples estimated from the information by monitoring.

REFERENCES:
patent: 5642296 (1997-06-01), Saxena
patent: 5685942 (1997-11-01), Ishii
patent: 5711843 (1998-01-01), Jahns
patent: 5910011 (1999-06-01), Cruse
patent: 5971591 (1999-10-01), Vona et al.
patent: 6197116 (2001-03-01), Kosugi
patent: 08-005542 (1996-01-01), None

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