Sample point interferometer having separate rigid body and figur

Details Sample point interferometer having separate rigid body and figur Sample point interferometer having separate rigid body and figur

1991-09-27

1993-06-15

Turner, Samuel A.

Optics: measuring and testing

By polarized light examination

With birefringent element

356363, G01B 902

Patent

active

052204065

ABSTRACT:
Optical metrology apparatus includes one or more first sample point interferometers (SPIs) (16) having a wide dynamic range for measuring a rigid body position of a surface of a structure, such as a segmented mirror (11). At least one second SPI (18), having a lower dynamic range, is employed for measuring a figure of the segmented mirror. Either the first or the second SPIs may also be employed to measure a lateral displacement between the mirror segments (11a, 11b). The use of multiple SPIs, having differing dynamic ranges, within a closed-loop mirror control system is also described.

REFERENCES:
patent: 4022532 (1977-05-01), Montagnino
patent: 4890920 (1990-01-01), Pond et al.
patent: 5080490 (1992-01-01), Manhart

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