Sample orientation system and method

Details Sample orientation system and method Sample orientation system and method

2007-10-30

2009-11-17

Chowdhury, Tarifur R. (Department: 2886)

Optics: measuring and testing

Position or displacement

Position transverse to viewing axis

Reexamination Certificate

active

07619752

ABSTRACT:
System and method for orienting the tilt and vertical position of samples in ellipsometer and the like systems.

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PCT Publication WO 99/45340.

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