Sample orientation system and method

Details Sample orientation system and method Sample orientation system and method

2007-06-12

2007-06-12

Chowdhury, Tarifur (Department: 2886)

Optics: measuring and testing

By polarized light examination

Reexamination Certificate

active

10652696

ABSTRACT:
Disclosed is a system comprising a stage with “X”, “Y” and “Z” translation and “X”, “Y” and optionally “Z” axes rotation capability, in combination with interrogation and monitoring means which act in functional combination to orient the surface of a sample so as to set an intended oblique approach of an electromagnetic beam with respect to a sample surface at a monitored location thereon.

REFERENCES:
patent: 4373817 (1983-02-01), Coates
patent: 4834539 (1989-05-01), Le Bris et al.
patent: 5042951 (1991-08-01), Gold et al.
patent: 5045704 (1991-09-01), Coates
patent: RE34783 (1994-11-01), Coates
patent: 5486701 (1996-01-01), Norton et al.
patent: 5596411 (1997-01-01), Fanton et al.
patent: 5608526 (1997-03-01), Piwonka-Corle et al.
patent: 5793480 (1998-08-01), Lacey et al.
patent: 5889593 (1999-03-01), Bareket
patent: 5900939 (1999-05-01), Aspnes et al.
patent: 5910842 (1999-06-01), Piwonka-Corle et al.
patent: 6297880 (2001-10-01), Rosencwaig et al.
patent: 6320657 (2001-11-01), Aspnes et al.
patent: 6600560 (2003-07-01), Mikkelsen et al.
patent: 6940592 (2005-09-01), Borden et al.
patent: 2002/0024668 (2002-02-01), Stehle et al.
patent: 2002/0033945 (2002-03-01), Xu et al.
PCT Wo 99/45340 Kla-Tencer.

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