Sample orientation system and method

Details Sample orientation system and method Sample orientation system and method

2006-08-01

2006-08-01

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

By polarized light examination

Reexamination Certificate

active

07084978

ABSTRACT:
Disclosed are systems and methodology for orienting the vertical position, and tilt, of samples, as applied in ellipsometer and the like systems.

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