Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2006-10-10
2006-10-10
Pham, Hoa Q. (Department: 2877)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
C356S237500
Reexamination Certificate
active
07119897
ABSTRACT:
A curved mirrored surface is used to collect radiation scattered by a sample surface and originating from a normal illumination beam and an oblique illumination beam. The collected radiation is focused to a detector. Scattered radiation originating from the normal and oblique illumination beams may be distinguished by employing radiation at two different wavelengths, by intentionally introducing an offset between the spots illuminated by the two beams or by switching the normal and oblique illumination beams on and off alternately. Beam position error caused by change in sample height may be corrected by detecting specular reflection of an oblique illumination beam and changing the direction of illumination in response thereto. Butterfly-shaped spatial filters may be used in conjunction with curved mirror radiation collectors to restrict detection to certain azimuthal angles.
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Stokowski Stanley
Vaez-Iravani Mehdi
Zhao Guoheng
KLA-Tencor Technologies Corporation
Parsons Hsue & de Runtz LLP
Pham Hoa Q.
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