Sample information measuring method and scanning confocal...

Details Sample information measuring method and scanning confocal... Sample information measuring method and scanning confocal...

2007-04-17

2007-04-17

Pyo, Kevin (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

C250S201300, C250S548000, C359S383000, C356S609000

Reexamination Certificate

active

10991123

ABSTRACT:
When irradiating a sample with light from a light source through an object lens, discretely changing a relative position between a beam condensing position of the object lens and the sample in an optical axis direction of the converging beam, obtaining light intensity information from the sample at each relative position, extracting plural pieces of light intensity information from a light intensity information group, estimating a maximum value on a change curve adaptive to the plural pieces of extracted light intensity information and the relative position for the maximum value, and obtaining the estimated maximum value of the light intensity information and relative position as brightness information and height information, these information about the sample can be continuously obtained by discretely performing an iterative operation on the relative position between a beam condensing position of the object lens and the sample in an optical axis direction of the converging beam.

REFERENCES:
patent: 5841894 (1998-11-01), Horie
patent: 9-68413 (1997-03-01), None
patent: 9-113235 (1997-05-01), None
patent: 11-264933 (1999-09-01), None

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