Coating apparatus – Work holders – or handling devices
Reexamination Certificate
2007-02-27
2007-02-27
Bueker, Richard (Department: 1763)
Coating apparatus
Work holders, or handling devices
C118S730000, C118S503000, C204S298150, C204S298270, C204S298280
Reexamination Certificate
active
11202173
ABSTRACT:
A sample holder for physical vapor deposition equipment, which is disposed in a vacuum chamber for holding samples, includes a transmission mechanism and a fastening mechanism. The transmission mechanism includes a stationary shaft and a transmission element. The fastening mechanism includes a rotation shaft unparalleled with the stationary shaft of the transmission mechanism, a support arm for securely holding the rotation shaft, and a rotational disk assembly that drives the rotation shaft and the support arm to rotate about the transmission mechanism. Two ends of the rotation shaft are connected to a rotation element and an affixation base. The rotation element rotates in response to the transmission element, thereby rendering the affixation base to perform inclined rotation. In this manner, the nano-meter ions can be coated continuously and homogeneously onto the sample surface to enhance the surface hardness, the erosion resistance and the life expectancy of the sample.
REFERENCES:
patent: 2168080 (1986-06-01), None
patent: 52-47530 (1977-04-01), None
patent: 512181 (2002-12-01), None
Bueker Richard
Lin Hong-Cing
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