Sample evaluating method by using thermal expansion displacement

Details Sample evaluating method by using thermal expansion displacement Sample evaluating method by using thermal expansion displacement

1992-10-01

1994-03-29

Turner, Samuel A.

Optics: measuring and testing

By particle light scattering

With photocell detection

356358, 356360, G01B 902

Patent

active

052989704

ABSTRACT:
When evaluating defects, etc. of a sample by measuring thermal expansion displacement on the surface of the sample, which is produced by irradiating thereto an excitation beam of which intensity is cyclically modulated, a measuring beam having the displacement frequency F.sub.1 is irradiated to the vibrating surface of the sample, and the reflection beam is interfered with a reference beam having the frequency F.sub.2. The beat wave signal E.sub.1 (Beat frequency F.sub.b =F.sub.1 -F.sub.2) is converted to a binary signal E.sub.2. Then, the sample is evaluated by signals which are obtained by giving a suitable processing to the binary signals. In addition, the optic axes alignment is eliminated by utilizing the excitation beam itself concurrently as measuring beam.

REFERENCES:
patent: 3409369 (1968-11-01), Bickel
patent: 4752140 (1988-06-01), Cielo et al.
patent: 4924477 (1990-05-01), Gilmore et al.
patent: 4930894 (1990-06-01), Baldwin
patent: 4948251 (1990-08-01), Kondo
patent: 4989980 (1991-02-01), Berg

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