Sample characteristic analysis utilizing multi wavelength and mu

Details Sample characteristic analysis utilizing multi wavelength and mu Sample characteristic analysis utilizing multi wavelength and mu

1995-08-15

1997-01-21

Epps, Georgia Y.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356328, 356367, G01J 400, G01J 328

Patent

active

055964060

ABSTRACT:
An optical measurement device is disclosed for evaluating the parameters of a sample. The device includes a polychromatic source for generating a probe beam. The probe beam is focused on the sample surface. Individual rays within the reflected probe beam are simultaneously analyzed as a function of the position within the beam to provide information at multiple wavelengths. A filter, dispersion element and a two-dimensional photodetector array may be used so that the beam may be simultaneously analyzed at multiple angles of incidence and at multiple wavelengths. A variable image filter is also disclosed which allows a selection to be made as to the size of the area of the sample to be evaluated.

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