Samarium-promoted oxidation of silicon and gallium arsenide surf

Details Samarium-promoted oxidation of silicon and gallium arsenide surf Samarium-promoted oxidation of silicon and gallium arsenide surf

1986-06-11

1987-08-04

Silverberg, Sam

Fishing, trapping, and vermin destroying

437225, B05D 512

Patent

active

046845410

ABSTRACT:
A method is provided for the oxidation of a silicon or gallium arsenide surface by depositing thereon a samarium overlayer comprising trivalent samarium prior to exposure of the surface to an oxidizing atmosphere.

REFERENCES:
F. U. Hillebrecht et al., Enhancement of Si Oxidation by Ce Overlayers, Brookhaven National Laboratory Internal Report (1986).

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