Salt suitable for an acid generator and a chemically...

Details Salt suitable for an acid generator and a chemically... Salt suitable for an acid generator and a chemically...

2006-03-28

2009-08-25

Seaman, D. Margaret (Department: 1625)

Organic compounds -- part of the class 532-570 series

Organic compounds

Carboxylic acid esters

C560S129000, C560S150000, C430S270100

Reexamination Certificate

active

07579497

ABSTRACT:
The present invention provides a salt of the formula (I):wherein ring Y represents monocyclic or polycyclic hydrocarbon group having 3 to 30 carbon atoms, in which one —CH2— group is substituted with —COO— group, and at least one hydrogen atom in the monocyclic or polycyclic hydrocarbon group may optionally be substituted with alkyl group having 1 to 6 carbon atom, alkoxy group having 1 to 6 carbon atom, perfluoroalkyl group having 1 to 4 carbon atoms, hydroxyalkyl group having 1 to 6 carbon atoms, hydroxyl group or cyano group; Q1and Q2each independently represent fluorine atom or perfluoroalkyl group having 1 to 6 carbon atoms; A+represents organic counter ion; and n shows an integer of 0 to 12.The present invention also provides a chemically amplified resist composition comprising the salt of the formula (I).

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