Salt suitable for an acid generator and a chemically...

Details Salt suitable for an acid generator and a chemically... Salt suitable for an acid generator and a chemically...

2007-08-28

2007-08-28

Page, Thurman K. (Department: 1621)

Organic compounds -- part of the class 532-570 series

Organic compounds

Carboxylic acid esters

C560S001000, C560S150000, C430S270100

Reexamination Certificate

active

11516644

ABSTRACT:
The present invention provides a salt of the formula (I):wherein X represents divalent or trivalent residue of acyclic hydrocarbon having 1 to 30 carbon atoms or divalent or trivalent residue of hydrocarbon having 3 to 30 carbon atoms which contains monocyclic or bicyclic ring, wherein —CH2— in the hydrocarbon may be substituted with —O— and one or more hydrogen atom in X is optionally substituted with alkoxy group having 1 to 6 carbon atoms, perfluoroalkyl group having 1 to 4 carbon atoms, hydroxyalkyl group having 1 to 6 carbon atoms, hydroxyl group or cyano group; Q1and Q2each independently represent fluorine atom or perfluoroalkyl group having 1 to 6 carbon atoms; A+represents organic counter ion; Y represents hydroxyl group, cyano group or methoxy group; and n shows 1 or 2.The present invention also provides a chemically amplified resist composition comprising the salt of the formula (I).

REFERENCES:
patent: 2003/0194639 (2003-10-01), Miya et al.
patent: 2006/0194982 (2006-08-01), Harada et al.
patent: DD 295421 (1991-10-01), None
patent: 2004-117959 (2004-04-01), None

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