Salt suitable for an acid generator and a chemically...

Details Salt suitable for an acid generator and a chemically... Salt suitable for an acid generator and a chemically...

2007-12-04

2007-12-04

Eyler, Yvonne (Department: 1621)

Organic compounds -- part of the class 532-570 series

Organic compounds

Carboxylic acid esters

C560S001000, C560S150000, C430S270100

Reexamination Certificate

active

11353010

ABSTRACT:
The present invention provides a salt of the formula (I)wherein X represents —OH or —Y—OH, n shows an integer of 1 to 9, A+represents an organic counter ion, Y represents a divalent saturated aliphatic hydrocarbon group having 1 to 6 carbon atoms.The present invention also provides a chemically amplified resist composition comprising the salt of the formula (I).

REFERENCES:
patent: 6893792 (2005-05-01), Miya et al.
patent: 2003/0194639 (2003-10-01), Miya et al.
patent: 2004-117959 (2004-04-01), None

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