Salt suitable for an acid generator and a chemically...

Details Salt suitable for an acid generator and a chemically... Salt suitable for an acid generator and a chemically...

2007-11-27

2007-11-27

Eyler, Yvonne (Department: 1621)

Organic compounds -- part of the class 532-570 series

Organic compounds

Carboxylic acid esters

C560S001000, C560S150000, C430S270100

Reexamination Certificate

active

11586640

ABSTRACT:
The present invention provides a salt of the formula (I):wherein ring X represents monocyclic or bicyclic hydrocarbon group having 3 to 30 carbon atoms, and one or more hydrogen atom in the ring X is optionally substituted with alkyl group having 1 to 6 carbon atoms, alkenyl group having 2 to 6 carbon atoms, alkoxy group having 2 to 6 carbon atoms or perfluoroalkyl group having 1 to 4 carbon atoms; Q1and Q2each independently represent fluorine atom or perfluoroalkyl group having 1 to 6 carbon atoms; A+represents organic counter ion; and n shows an integer of 1 to 12.The present invention also provides a chemically amplified resist composition comprising the salt of the formula (I).

REFERENCES:
patent: 2003/0194639 (2003-10-01), Miya et al.
patent: 2004-4561 (2004-01-01), None
patent: 2004-117959 (2004-04-01), None

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