Safety gas controlling system

Details Safety gas controlling system Safety gas controlling system

1998-07-15

2000-03-14

Nguyen, Kiet T.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

250423R, H01J 4900

Patent

active

060376007

ABSTRACT:
Disclosed is a safety gas controlling system utilizing a vacuum transducer to detect the pressure of gas transmitted to an ion implantor. If the gas pressure is lower than a predetermined value, an electronic temperature controller starts to operate a heater to heat a safety delivery source cylinder (SDSC), and at the same time heating temperature is fed back with a signal to the electronic temperature controller by a temperature sensor so as to maintain a stable gas pressure. The gas stored in the SDSC expands by heating and the gas is transmitted under an increased but stabilized pressure resulting in minimizing the amount of residual gas in the SDSC.

REFERENCES:
patent: 4883969 (1989-11-01), Ishida et al.

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