Saddle field source

Details Saddle field source Saddle field source

1994-10-11

1996-01-30

Berman, Jack I.

Radiant energy

Ion generation

Field ionization type

250427, 250251, 31511181, 31511191, 3133591, H01J 3708, H05H 300

Patent

active

054882281

ABSTRACT:
The invention is directed to a saddle field source for ions or neutral particles which is asymmetrically configured. The saddle field source preferably has three electrodes and has an improved efficiency.

REFERENCES:
patent: 3944873 (1976-03-01), Franks et al.
patent: 4122347 (1978-10-01), Kovalsky et al.
patent: 4354113 (1982-10-01), Goode et al.
patent: 4412153 (1983-10-01), Kalbfus et al.
patent: 4608513 (1986-08-01), Thompson
Flemming, J. Vac. Sci. Technol., vol. 12, No. 6, Nov./Dec. 1975, pp. 1369-1372.
"Atom beam source" by J. Franks, Vacuum, vol. 34, Nos. 1-2, 1984 pp. 259 to 261.
"Ion sources for ion beam assisted thin-film deposition" by W. Ensinger, Rev. Sci. Instrum. 63 (11), Nov. 1992, American Institute of Physics, pp. 5217 to 5233.

Affiliated with

Also associated with

Rating

Saddle field source does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Saddle field source, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Saddle field source will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-157934